Mass Flow Meters & Mass Flow Controllers - Overview

The outstanding performance of Sensirion's mass flow meters and mass flow controllers is based on patented CMOSens® Technolgy; consisting of a calorimetric microsensor (MEMS) integrated with signal conditioning electronics on a single chip. 

			Mass Flow Meter EM1  At an unbeaten price/performance ratio the mass flow meter EM1 covers a very wide flow range (1:100) with an accuracy of 3% of measured value. The sensor enables fast (5 ms), accurate and reliable flow measurement for a wide range of standard and OEM applications.
			NEW Mass Flow Meter SFM4100 for Medical Gases Designed for anaesthesia devices, the fully calibrated SFM4100 features a digital I2C interface, excellent stability, and an impressively wide dynamic measuring range. Thanks to its 'Multigas' function, the sensor can be set up and calibrated for several different gases in parallel.
			Mass Flow Sensor ASF1400/ASF1430 for Air ASF1400/1430 mass flow sensors measure air flows with highest accuracy (1% m.v.). They cover an unique and wide dynamic range from 0.03 - 400 sccm. The fully calibrated & temperature compensated sensors have a digital interface (RS232 or SPI) and are CE certified.

			Mass Flow Controller SFC3000 The SFC3000 is a small, fully digital mass flow controller for high-volume OEM applications. Its excellent stability and repeatability make it ideal for analytical instruments. Different gas types and control ranges can be calibrated and switched by software.
			Mass Flow Controller SFC4000 The mass flow controller SFC4000 is an extremely fast, precise and accurate analog mass flow controller. It offers an analog interface (0-5 V) in standard mechanical dimensions. Required power supply is unipolar 14 to 24 Vdc.

OEM Solutions for Gas Flow Measurement & Control Based on our leading CMOSens® Technology, Sensirion delevops customized sensor modules & complete devices for process control & mass flow controllers, metering, medical instruments, building control, HVAC and many other applications.

 Flow sensor solutions for gases

	Gas Flow Sensor Products
	- Mass Flow Meter EM1
	- Mass Flow Meter SFM4100
	- Mass Flow Sensor ASF14x0
	- MF Controller SFC3000
	- MF Controller SFC4000
	- OEM Solutions
	Document Center
	- Datasheet EM1
	- Datasheet SFM4100
	- Datasheet ASF1400
	- Datasheet ASF1430
	- Datasheet SFC3000
	- Datasheet SFC4000
	Technology