Mass Flow Controllers

 All CMOSens® mass flow controller (MFC) offer fast and accurate control of gas flows over a very wide range. The overall performance of a MFC depends mainly on the mass flow sensor used in it. The leading performance of Sensirion MFC is based on Sensirion’s unsurpassed CMOSens® sensor technology which combines a high precision sensor element with the amplification and A/D converter circuit on one single CMOS chip.

The digital calibrated and temperature compensated sensor signal is converted directly on the CMOSens® chip into a signal which is used in the analog or digital controlling circuit to control the valve. This results in very high accuracy, fast settling time and large dynamic range.

CMOsens® mass flow controllers are highly suitable for a variety of applications like dry etching, surface coating, gas mixing, gas analysis, and many others.

Mass Flow Controller SFC3000 The SFC3000 is a small, fully digital mass flow controller for high-volume OEM applications. Its excellent stability and repeatability make it ideal for analytical instruments. Different gas types and control ranges can be calibrated and switched by software.

Mass Flow Controller SFC4000 The SFC4000 is an extremely fast, precise and accurate analog mass flow controller. It offers an analog interface (0 – 5 V) in standard mechanical dimensions. Required power supply is unipolar 14 to 24 Vdc.